ALD Short Course in English - 5. ALD Systems

ALD Short Course 2019 Spring in English by Prof HBRL 5. ALD Systems Content: ALD chamber design, various types of ALD chambers, spatial divided ALD Chapters 1. Review of Fundamentals 2. Introduction of ALD 3. Basic Growth Characteristics of ALD 4. ALD Precursors & Reactants 5. ALD Systems 6. ALD Applications for Si Devices 7. Atomic Crafting Beyond ALD Lecturer: Prof. Han-Bo-Ram Lee hbrlee@inu.ac.kr http://nanomaterial.kr

Видео ALD Short Course in English - 5. ALD Systems автора Научный гений