MIT Freshmen Pre-Orientation: Discover EE - MIT.nano Tour (with music)
During the FPOP Discover EE tour (live), we learned about the fab and spin-coated a wafer with photoresist.
In this video, we take the FPOP group photo and etch it into a thin film of aluminum on our 150mm diameter Si wafer. The wafer has a thin SiO2 and SiN film on it that acts as an antireflective coating (making it look very dark blue). That gives the aluminum a great contrast.
While this demo is very simple, the same tools and methods can be used to pattern metal layers (e.g. to create electrical interconnects) for many different devices. For etching finer features, we would use a different tool (e.g. a plasma etcher), rather than the method used here.
Видео MIT Freshmen Pre-Orientation: Discover EE - MIT.nano Tour (with music) канала MIT.nano
In this video, we take the FPOP group photo and etch it into a thin film of aluminum on our 150mm diameter Si wafer. The wafer has a thin SiO2 and SiN film on it that acts as an antireflective coating (making it look very dark blue). That gives the aluminum a great contrast.
While this demo is very simple, the same tools and methods can be used to pattern metal layers (e.g. to create electrical interconnects) for many different devices. For etching finer features, we would use a different tool (e.g. a plasma etcher), rather than the method used here.
Видео MIT Freshmen Pre-Orientation: Discover EE - MIT.nano Tour (with music) канала MIT.nano
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