Cryopump | Vacuum Pumps

The cryopump (cryogenic pump) is a high vacuum pump that is based on the adsorption of gas on cold surfaces. The cooler the surface – the better the pumping! For that purpose liquid helium is often used for cooling the system parts as it is extremely cold, having a temperature only four degrees above absolute zero. The pumping is done in multiple stages, where each stage has a different temperature. The „warmest“ part is the first stage, that has a temperature of 100 degrees Kelvin (or lower) and that causes water to condensate on it. During the condensation of water also some other gases may also be trapped under the water and that process is called cryotrapping. However, in order to effectively pump gases such as nitrogen, even colder surfaces (less than 17 degrees Kelvin) are required. In this stage the metal may also be coated with porous activated charcoal and that allows to adsorb even smaller gas molecules such as helium and even hydrogen (this is called cryosorption). So basically the pumping of gases with a cryopump is based on three processes: condensation, cryotrapping and cryosorption.

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Видео Cryopump | Vacuum Pumps канала Captain Corrosion