Surface Metrology Precise Analysis with Probe Data

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Discover how to accurately define surfaces for metrology analysis using probe data. See real examples of defining plastic and aluminum surfaces with astonishing resolution, achieving 1/10th voxel size.
[19:56-20:18]
we're just looking at one probing, but you do this on the multiple spots on the interface to figure out the entire surface, like this. So this is how you define the surface more accurately to do metrology analysis. And what we're looking at here is just a cartoon version of it, but let's take a look at a real example.
[20:19-20:48]
So this is a part of on piece of plastic, and you see the yellow line, that's the defined surface. Let's zoom into one area. So those thin yellow lines are the probes to figure out the interface, and this orange line is to define the surface. And you notice that this line is running right inside of the voxels, and this is how you can achieve one10th of a voxel size resolution.
[20:48-21:09]
Let's take a look at an example we saw before. So this is the CT scan of the aluminum piece, and this scan was done at 69.5 micron voxel. And by doing the ISO 50 surface determination, you can define the surface at 7 micron resolution.

Видео Surface Metrology Precise Analysis with Probe Data канала Rigaku Corporation