Carl Zeiss S-planar lens pt.3: light collimation

Before the Carl Zeiss s-planar photo-lithography lens can be used as intended, it is necessary to find a way to get as much light as possible into the optical tube. Another aspect is the uniformity of the projection field. A simple diffuser plate does not work since it is very inefficient: only 0.12% of the light reaches the entrance pupil of the lens. The method that is chosen is by projection of the light source using a large condenser mirror.

The mirror used has previously been part of a Perkin Elmer Micralign system, which is also discussed very briefly. The images of the Micralign were taken from the website https://www.chiphistory.org, which contains an incredible amount of information on the history of photolithography machines.

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