VULCANO2: forward integration concept from ETEL for highly dynamic, vibration-free platforms

VULCANO2 from ETEL features a gantry stacked-axis architecture built on a mechanical bearing coupled with high-end optical encoders and ETEL ironcore motors. Its innovative design enables high dynamic performance with improved positioning accuracy and motion control. The platform meets system requirements for higher dynamic performance, throughput, and duty cycles, as well as heavier payloads, without sacrificing repeatability or accuracy. VULCANO2 is also a perfect solution for all use cases requiring positioning accuracy over extended periods. Typical uses are in wafer process control applications such as overlay metrology, critical dimension metrology, thin film metrology, and flip-chip processes.

For more information about ETEL motion systems for rotary and linear axes, visit: https://sps.heidenhain.de/en/high-end-bewegungssysteme.html

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