E-beam lithography at DTU Nanolab
DTU Nanolab has a JEOL 9500FS Electron Beam Lithography System that allows lateral structure definition down to 10 nanometer. In this video you can see the general workflow for doing E-beam lithography at our lab.
Видео E-beam lithography at DTU Nanolab канала DTU Nanolab
Видео E-beam lithography at DTU Nanolab канала DTU Nanolab
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